摘要
采用真空射频辉光放电技术对喷砂酸蚀工艺处理后的钛表面进行等离子体氧化工艺的优化研究,以用于牙种植体表面改性。以钛表面的接触角作为正交试验的参考指标,对等离子体氧化工艺进行优化。在试验范围内,优化的参数为:工作压力为6.5 Pa,O2/Ar=1(Ar=5 sccm),基板直流偏压为400 V,射频功率为200 W,氧化时间60 min。利用扫描电子显微镜、接触角测量仪及X射线光电子能谱仪研究了优化后的氧化膜对钛表面形貌、亲水性的影响以及其化学组成和价键状态。结果表明:优化工艺处理后,钛片表面保留了原有的多孔形貌,并获得了平均接触角低于10°的超亲水性表面,但随着暴露空气时间的增加,其接触角会增大;钛表面出现Ti4+和Ti3+离子,其中二者的比例基本相同。
Titanium surface was roughed by sandblasting and acid-etching（SLA） process, and then plasma oxidation on the tita- nium surface was investigated to improve the surface properties of dental implant by radio frequency glow discharge in vacuum chamber. The contact angle of titanium surface was analyzed by the orthogonal experiment method. The optimum parameters are selected within the test range, which is： working pressure （6.5 Pa）, O2/Ar=1 （Ar=5 sccm）, substrate bias voltage （400 V ）, radio frequency power （200 W）, oxidation time （60 min）. The scanning electron microscopy （SEM）, contact angle meter and X-ray photoelectron spectroscopy （XPS） were used to explore the influence of topography, hydrophily of oxidation thin film on titanium surface after optimizing and its chemical compositions and bonds. The results show that micro-sized porous structure obtained by SLA process is retained and the superhydrophilic surface with contact angle below 10° is obtained. But the contact angle has a trend of increase with the time prolong in the air. The ions of Ti^4＋ and Ti^4＋are found on the surface with nearly equal content of proportion.
出处
《真空》
CAS
2015年第2期70-74,共5页
Vacuum
基金
辽宁省自然科学基金资助(201202058)
中央高校基本科研业务费专项资金资助(N130403004)
沈阳市科技计划项目资助(F13-295-1-00)
关键词
等离子体氧化
正交试验
钛
超亲水性
plasma oxidation
orthogonal experiment
titanium
superhydrophilic
