摘要
涡轮分子泵是一种工作在一阶临界转速之上的精密高速旋转机械,在设计时需要避开其临界转速。以有限元软件SolidWorks Simulation为依托,结合传递矩阵理论的简化思想,对涡轮分子泵轴系进行模态分析,并寻找其临界转速与设计工作转速冲突的最优解决方案。同时,对涡轮动叶片组的有限元简化方式进行了探讨。
The turbo-molecular pump is a precision high-speed rotating machine working above its first critical speed. Therefore, when design the pump, it is essential to avoid its critical speed. By using the FEA software Solid Works Simulation to analysis the vibration mode of the turbo-molecular pump which had been predigested by the ideology of transfer matrix method, in this paper, we have found a good way to balance the contradiction between its critical speed and working speed designed. Meanwhile, the discussion on how to simplify the turbine blade groups in the FEA model was also included in detail.
出处
《机械》
2015年第1期19-22,共4页
Machinery
关键词
涡轮分子泵
临界转速
传递矩阵法
有限元
turbo-molecular pump
critical speed
transfer matrix method
FEA