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溅射法制备TiO_2薄膜的耐腐蚀性 被引量:5

Corrosion Resistance Behavior of TiO_2 Thin Films Prepared by Sputtering
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摘要 采用溅射法在石英和316L不锈钢衬底上制备TiO2薄膜。采用X射线衍射仪(XRD)、扫描电镜(SEM)、原子力显微镜(AFM)观察薄膜的微观结构和表面形貌。结果表明:沉积后的TiO2薄膜表面均匀、致密,为锐钛矿结构。600℃退火后,薄膜中有金红石相生成。基于透射谱,计算得到的薄膜光学带隙在3.2eV左右。在PBS模拟体液中,测试材料的动电位极化曲线。结果显示,沉积TiO2薄膜后,材料的耐腐蚀性得到改善。退火后,TiO2薄膜的自腐蚀电位正向移动94mV,自腐蚀电流最小,为4.828μA·cm-2。 TiO2 thin films were prepared by sputtering on 316L stainless steel and fused quartzes. The microstructure and surface morphology of the films were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM) and atom force microscopy (AFM). The results indicate that the as-deposited TiO2 thin film has uniform and crack-free surface with anatase structure. The rutile phase is formed in the film annealed at 600. The calculated optical band-gap of the films is around 3.2 eV based on transmission spectra. The potentiodynamic polarization is tested in PBS simulated body solution. It shows that the corrosion resistance of 316L stainless steel is improved with TiO2 thin films. The corrosion potential shifts positively +94 mV for the annealed TiO2 thin film. While, it has the lowest corrosion current density (4.828μA·cm-2).
出处 《材料工程》 EI CAS CSCD 北大核心 2014年第12期34-38,共5页 Journal of Materials Engineering
基金 国家自然科学基金资助项目(51165031)
关键词 TIO2薄膜 溅射 316L不锈钢 微观结构 耐腐蚀性 Corrosion Corrosion resistance Energy gap Microstructure Oxide minerals Scanning electron microscopy Sputtering Stainless steel Thin films Titanium dioxide X ray diffraction
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