摘要
薄膜型气敏器件对气体具有探测灵敏度高、响应时间快、制备成本较低、易于小型化等特点,并且适于制备微型传感器,因此成为近年来传感器研究的重点。将纳米结构材料制作成薄膜型气敏传感器,具有常规传感器不可替代的优点:纳米结构构成的固体材料具有庞大的界面,提供了大量气体通道,从而大幅度提高了灵敏度和降低了工作温度,并可缩小传感器的尺寸。文章主要介绍了当前国内外纳米结构薄膜型气敏传感器的研究现状,概述了几种常见的纳米结构单元薄膜的气敏特性,扼要地分析了今后纳米薄膜型传感器的研究趋势。
Recently, thin film gas sensors have become a hot topic in the development of gas sensors, due to their high detection sensitivity, quick response, low cost in preparation, and easy miniaturization. In particular, the use of nanomaterials in the thin films gives these sensors in-comparable advantages over conventional sensors. Solid state nanostructures have very large inter-face surface areas and many gas channels so the sensitivity can be greatly enhanced, which can re-duce the operating temperature and sensor size. This article reviews current domestic and foreign research on nanostructured thin film sensors, and outlines the gas sensing properties of several common films with different nano-structural units. Finally, future directions in this field are ana-lyzed.
出处
《物理》
CAS
北大核心
2014年第6期364-372,共9页
Physics
基金
国家自然科学基金(批准号:10974203
51002158)资助项目
关键词
薄膜
气敏传感器
纳米结构
thin film
gas sensors
nano-structures
