摘要
对现有八氟环丁烷的用途和纯化工艺进行简述,并介绍了公司自主研发的纯化工艺,采用精馏-吸附相结合的工艺,产品符合半导体行业使用要求。
In this paper,introduced the application and purification technology of octafluorocyclobutane,and also introduced the purification process of the company,using distillation and adsorption process,the products meet the requirements of the semiconductor industry.
出处
《低温与特气》
CAS
2014年第6期28-30,共3页
Low Temperature and Specialty Gases
关键词
八氟环丁烷
纯化
精馏吸附
octafluorocyclobutane
purification
distillation
adsorption
