摘要
研究了以Mo为衬底在Si(100)基片上沉积SmCo7永磁薄膜的高温磁学性能。结果表明,高温老化处理对薄膜的晶体结构和磁性能没有显著影响。根据趋近饱和定律和薄膜的高温磁化曲线,获得了磁晶各向异性常数K1随温度的变化关系。该关系说明随着温度的增加,SmCo晶粒的取向在一定程度上受到了破坏。此外,薄膜磁性能随温度的变化关系适当,可以满足在微电子机械系统(MEMS)中的应用。
High temperature magnetic properties of the SmCo7 films deposited on Si（100） substrate with Mo underlayer were investigated.The results show that the effects of high temperature aging treatment on the crystal structure and the magnetic properties of the films are not obvious.According to the law of approach to the saturation and high temperature magnetization curves of the films,the temperature dependence of magnetic anisotropy constant K1 can be obtained,which clearly suggests that the preferred orientation of SmCo crystalline will be destroyed at a certain extent by elevated temperatures.Moreover,the proper temperature dependence of magnetic properties for the films,is suitable for applications in microelectromechanical system（MEMS）.
出处
《稀有金属材料与工程》
SCIE
EI
CAS
CSCD
北大核心
2014年第10期2335-2338,共4页
Rare Metal Materials and Engineering
基金
Scientific Research Foundation of CUIT(KYTZ201112)
Young and Middle-Aged Academic Leaders of Scientific Research Funds of CUIT(J201222)
关键词
稀土永磁
SmCo薄膜
高温应用
MEMS
rare earth permanent magnets
SmCo films
high temperature applications
MEMS
