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电涡流扫描测量的边沿位置反演算法研究

Research on Edge Position Inverse Algorithm in Eddy Current Scanning Measurement
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摘要 针对不规则面形电涡流检测中边沿几何特征准确提取难题,定性分析了电涡流传感器扫描测量中边沿几何突变对输出电信号的影响机理。提出了综合考虑提离高度与扫描速度的边沿特征反演方法,建立了基于电信号轮廓曲线突变点辨识的边沿特征位置反演算法,实验研究了扫描速度与提离高度对边沿位置的影响规律。与实际标定实验相比,利用本文算法计算出的边沿特征位置反演误差可控制在0.02mm^0.04mm范围内。 Due to the edge feature extraction problem in irregular surface measurement using eddy current senor,the influence mechanism of edge feature to output signal is qualitatively analyzed. An inverse method of edge feature is proposed considering lift-off height and scanning speed. Furthermore,an inverse algorithm of edge feature position is built based on the identification of mutational point in electric signal curve. The influence of lift-off height and scanning speed to edge position is researched in experiments. Comparing with experimental calibration results,the error of edge feature position calculated by the inverse algorithm presented in this paper can be controlled in 0. 02 mm ~ 0. 04 mm.
出处 《组合机床与自动化加工技术》 北大核心 2014年第10期89-92,共4页 Modular Machine Tool & Automatic Manufacturing Technique
关键词 电涡流测量 边沿位置 反演算法 提离高度 扫描速度 eddy current measurement edge position inverse algorithm lift-off height scanning speed
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