摘要
推导了分划板失调量与待测系统调制传递函数(MTF)下降之间的解析表达式,对光管和待测系统焦距比与分划板装调精度之间的数学关系进行仿真分析,发现焦距比为1,分划板轴向装调误差为0.0012mm引起的待测系统MTF下降为0.01。据此提出依据Zernike系数定量指导装调,采用数字干涉仪与平行光管、分划板构成干涉光路进行逐次迭代调整的方法。实验与数学分析均表明,上述方法可显著提升分划板装调精度,其引起的探测器离焦导致的MTF下降可控制在0.013。实验结果与理论值之间的偏差表明,环境扰动等不确定度对标定精度产生影响,在测试环境良好的条件下采用上述装调方法,使用焦距与待测光电系统焦距相当的平行光管就可满足高精度光学标定与装调的测试需求。
The mathematical representation of the modulation transfer function （MTF） decline caused by reticle alignment error is deduced. And the relationship between the focal length ratio （FLR） and the alignment precision of reticle is analyzed. When FLR equals to 1, the alignment error of reticle equal to 0. 0012 mm which causes the MTF drops to 0.01. Based on that, the manuscript reports a method according to the Zernike coefficient as a quantifying criterion to guide alignment process. Interferometer, collimator and special reticle are used to generate interference fringes. The verified experimental results and mathematical analysis indicate that the new procedure can improve alignment accuracy of collimator reticle remarkable, and the MTF decline of the photoelectric imaging system under calibrating is reduced to 0. 013. The environmental elements effect the calibration result. Using this alignment method, the collimator has the same focal length as the system under testing can be used in very high precision optical testing and calibration.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2014年第9期149-155,共7页
Acta Optica Sinica
基金
国家自然科学基金(61307114)
关键词
测量
光学检测
装调与标定
猫眼干涉法
平行光管
分划板
measurement
optical testing
calibration and alignment
cat eye interferometry
collimator
reticle
