摘要
用正硅酸乙酯、硝酸铝、硝酸钙、硝酸镁经化学反应,添加燃烧剂烧结后研磨制成了超细玻璃粉原料;用水合三氯化钌高温脱水法制备了氧化钌粉原料;采用低温共烧(LTCC)制成了混有这两种原料的钌厚膜电阻。采用差热分析仪、激光粒度仪和扫描电子显微镜进行了分析表征。结果表明,制备的电阻浆料与LTCC生瓷烧结性能相匹配,稳定性好,温度系数在±200×10-6/℃以内,制备的电阻器平均方阻为88.5Ω/□。
The fine glass powders were prepared by chemical reaction of tetraethoxysilane, aluminum nitrate, calcium nitrate, and magnesium nitrate, followed by sintering with combustion agents and grinding to give a fine particle size suitable for making thick film resistor paste. Conductive powders RuO2 was prepared by dehydration of RuCI3·nH2O at high temperature. The glass powders, RuO2, were mixed to prepare thick film resistor under typical low temperature co-fired ceramic technology procedure. The DTA and size distribution of glass powders, the morphology and electrical properties of the resistor have been studied. The paste shows well sintering compatibility with LTCC green tape, the formed resistor exhibits good stability and its temperature coefficient of resistance is within the range of 4-200 ppm/℃, and the prepared resistors have an average sheet resistance of 88.5 Ω/□.
出处
《贵金属》
CAS
CSCD
北大核心
2014年第3期24-28,共5页
Precious Metals
基金
Projects in the National Science & Technology Pillar Program (NO.2012BAE06B00 and 2013-02-02-A-G-02-3040)
关键词
复合材料
超细玻璃粉
钌
厚膜电阻浆料
LTCC
composite materials
super fine glass powders
Ru
thick film resistor paste
LTCC
