摘要
针对光学线径检测,文中提出了一种基于几何模型的非接触线阵CCD测量线径方法,搭建了CCD实时在线非接触式线径测量系统,并详细阐述了如何通过拟合补偿实现线径测量精度的提高,编程实现了稳定的μm级尺寸几何量测量。实验结果证明,改进后的模型及算法补偿后运用到该光学检测系统中,能克服人工检测所具有的缺点,并能实现非接触在线检测线径,且精度较高,具有很高的推广应用价值。
On the problem of the optics wire diameter measurement,a non-contact geometry model of the array CCD measurement method was proposed. And a set of real-time on-line wire diameter CCD measurement system was built up. Wire diameter measurement achieved by fitting the compensation precision was expounded in detail. Code of the steady micron-grade dimension measurement were accomplished. The model and improved algorithm after compensation was applied to the system. The experimental results prove that it can overcome the shortages of manual measure and has much application value in such aspects as high precision and non-contact measurement.
出处
《仪表技术与传感器》
CSCD
北大核心
2014年第7期33-36,共4页
Instrument Technique and Sensor
基金
国家自然科学基金资助项目(61106107)
电子科技大学校企合作基金项目(H04010801W080421)
关键词
线径测量
线阵CCD
最小二乘
拟合补偿
非接触检测
wire diameter measurement
liner CCD
least square
fitting compensation
non-contact measure