摘要
在集成微电容式传感器的研究中,由于敏感电容值的变化量非常微小,其接口电路的研究对传感器性能提升是至关重要的。设计了一种基于电流镜原理检测的微电容式传感器接口电路,电路由电容转换电压电路、减法器电路、脉冲电路、缓冲器电路等组成。基于0.18μm CMOS工艺库对电路进行设计仿真,结果表明该电路便于与敏感电容兼容,输出电压与敏感电容成线性关系,其检测精确度高、范围广。
In the research of integrated micro-capacitive sensors, because of the change in sensitive capacitance is very small, the interface circuit research is very important for improving the sensors＆#39; performance. An interface circuit for micro-capacitive sensors based on the principle of current mirror is designed. The circuit consists of the capacitance-voltage measuring circuit, subtractor circuit, pulse circuit, buffer circuit, and so on. Based on 0.18μm CMOS process library to design and simulate this circuit, the results show that the circuit is easy to be compatible with sensitive capacitor; the output voltage has a linear relationship with sensitive capacitance. The circuit has high detection precision and wide measuring range.
出处
《电子技术（上海）》
2014年第7期48-51,共4页
Electronic Technology
基金
2012年浙江省大学生科技创新活动计划(新苗人才计划)项目(2012R419002)
宁波市自然基金(2013A610010)
关键词
微电容式传感器
接口电路
电流镜
敏感电容
micro-capacitive sensor
interface circuit
current mirror
sensitive capacitance
