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Structural and Optical Characterization of Indium Zinc Oxynitride Thin Films

Structural and Optical Characterization of Indium Zinc Oxynitride Thin Films
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出处 《材料科学与工程(中英文A版)》 2014年第3期91-98,共8页 Journal of Materials Science and Engineering A
关键词 氧化锌薄膜 氧氮化物 晶体结构 光学特性 SI(100) 椭圆偏振光谱法 薄膜沉积 反应磁控溅射 Indium zinc oxynitride, spectral ellipsometry, nitrogen incorporation.
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参考文献16

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