摘要
激光干涉测量系统在非接触精密测量领域占有重要地位,其中对干涉条纹的测量是激光干涉测量的核心。针对这种情况,提出利用线阵CCD将激光垂直照射在劈尖表面时所产成的干涉条纹光学图像转换成电信号并转移输出,通过视频信号预处理电路,模数转换后得到关于干涉条纹宽度的方度信号,完成了对CCD输出干涉条纹信号的处理,实现了对等间距干涉条纹的自动检测。
Laser interference instrument is very important in uncontacted precision measurement field,the measurement of interference fringes is the key in laser interferometry.To deal with this problem,a linear CCD is used to induce the interference fringes and output electric signal when laser is shining optical wedge vertically,then the signal is preprocessed and transformed into square-wave signal which contain fringe width information.Signal processing from the output image signal of CCD is accomplished.The auto-testing for equally spaced interference fringes is realized.
出处
《测控技术》
CSCD
北大核心
2014年第7期43-45,共3页
Measurement & Control Technology
基金
上海高校青年教师培养资助计划(ZZTH12010)
关键词
线阵CCD
非接触测量
激光干涉
条纹宽度
linear CCD
non-contact measurement
laser interference
fringe width
