摘要
本文探讨了一种可绝对测量光学平面面形误差的新方法,利用该方法可以消除或修正干涉仪测量光学平面面形误差时所存在的固有系统误差和参考光学平面本身的面形误差,同时也对干涉仪进行了绝对校准。
In the paper,new method of absolutely measuring the surface Shape error of optical plane is approached.By use of this method,some inherent system errors,which exist in surface Shape error of optical plane measured With an interferometer,and the surface Shape errors of a reference optical plane itself can be eliminated or corrected.In the meanwhile,the interferometer canbe be also absolately calibrated.
出处
《应用光学》
CAS
CSCD
1991年第2期53-55,共3页
Journal of Applied Optics
关键词
光学平面
面形误差
测量
optical plane
surface Shape error
measurement
