摘要
分析椭偏光谱光度法测量中回归方程的拟合精度与样本量的关系 ,提出在一定的样本量范围内 ,测量误差与样本量的一次方成反比的近似定量关系 ;用拟合曲线的标准差和相关系数来评价拟合精度的局限性 ;并指出 ,对测量精度产生重要影响的样本量存在着一个上界 ,参照由实验确定的这个上界 ,即可选择一个既能保证较好的测量精度 。
This paper investigates the relation between sample size and fitting accuracy of the regression equation in the measurement of ellipsometric spectra.It is found that within certain sample size,the measurement error is approximately inversely proportional to the sample size,and the performance of the fitting accuracy is evaluated by the standard deviation and the correlation coefficient . In addition,an upper bound on the sample size,determined through experiments, can be used to select appropriate sample size which guarantees good measuring accuracy.
出处
《深圳大学学报（理工版）》
EI
CAS
2002年第2期22-28,共7页
Journal of Shenzhen University(Science and Engineering)
基金
深圳市科委科研基金资助项目 (2 0 0 1 6)
