摘要
综述了化学气相沉积热解炭的沉积机理、化学动力学的发展状况及一些基本理论问题 ,着重介绍了K.J.
The development and some fundamentals of mechanism and kinetics of CVD of pyrolytic carbon are reviewed in this paper.Special emphasis is given to the deposition model proposed by K.J.Huettinger et al.
出处
《炭素》
2002年第2期7-10,共4页
Carbon
