摘要
研制了用于测量光学非球面面形的条纹扫描型棱镜式剪切干涉仪。介绍了该仪器的测量原理、电路和数据处理过程。还推出了二次曲面与最适球面的差值。这样,当最适球面半径与被测件孔径相比很大时不测最适球面半径也可得到被测面相对于设计值的偏差。最后给出了一个非球面面形的测量例。
The basic principle,measuring process and data processing technique have been introduced for our newly developed Fringe Scanning and Prism Shearing Interferometer which is used to test aspherical surface,a set of formula which describes the difference between the quadratic surface and the best-fiting aspherical surface has also been derived,it can be used to calculate the deviation between the theoretical value and the real value,without measuring the radius of curvature of the best-fitting sphere when the radius is very large.Finally,an example of aspherical surface testing is given.
出处
《西安工业学院学报》
1991年第3期9-14,共6页
Journal of Xi'an Institute of Technology