摘要
本文叙述了当前世界上亚微米、深亚微米技术的发展趋势,分析了我国亚微米技术的现状,最后介绍了机械电子工业部第十三研究所在亚微米技术方面的进展及其在半导体器件与集成电路制造中的成功应用。
Developing trend of submicron and nanometer technology nowadays in the world is presented. Current submicron technology in China is also described. Finally, the development of submicron technology in 13th Research Institute of MMEI and it's applications to the manufacture of semiconductor devices and integrated circuits are introduced.
出处
《微细加工技术》
1991年第2期1-14,共14页
Microfabrication Technology
关键词
半导体器件
集成电路
亚微米技术
Semiconductor
Integrated circuit
Semiconductor technology.
