摘要
利用网络和图书馆对国际上 1996年至今的压电微马达研究进展进行了调研。分别介绍了压电薄膜、陶瓷的行波、驻波类微马达的最新研究情况 ,同时也对一种具有与压电微马达特性相同的静电超声微马达的研究作了说明 。
In order to obtain the development of piezoelectric micromotors in the world recently,I have searched the papers and researches on the topics of the piezoelectric micromotors published since 1996 with the internet tools and library.This paper reviews the novel researches on the piezoelectric film and ceramic block micromotors using traveling and standing wave,and also introduce the electrostatic micromotor with the same characteristics as piezoelectric motors.At the end the principle of the piezoelectric ceramic traveling wave micromotor in our lab will be presented.
出处
《压电与声光》
CSCD
北大核心
2002年第2期116-121,共6页
Piezoelectrics & Acoustooptics
关键词
压电微马达
压电薄膜
静电超声微马达
micromotor
micro actuator
piezoelectric ceramic
ultrasonic motor
