摘要
研究了单光激光同轴测量仪样机及其数据处理模型、数据采集与处理的计算机程序。该程序可以在 DOS或 Windows95环境下运行。数据处理模型给出了激光光斑在光电半导体位置探测器 (PSD)上的轨迹与待调两轴相对位置的关系。按照此模型 ,只要测量 L D/PSD在两个角度时光斑的坐标 。
The coaxial measuring instrument with LD/PSD was designed.Its data handle model and the computer programs for data gather and handle are studied.This program can run under DOS or Windows 95 environments.The data handling model gives the relation between the laser spot locus on PSD and the relative location of two shafts.According to this model,the location can be got so long as measuring light spot coordinate of LD/PSD in two angles,and its sensitivity is 5 μm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2002年第4期378-381,共4页
Journal of Optoelectronics·Laser
基金
天津市教委科研基金资助项目 (9712 1)
天津市"材料物理与化学"重点学科资助项目
