摘要
采用微细加工的方法研制出了一种可调式微机械光衰减器 ,对该衰减器的性能进行了测试 ,并对影响其光学性能的因素作了分析。测试表明 ,该衰减器的插入损耗<3dB ,衰减范围 0～ 4 0dB ,回波损耗 <- 45dB ,衰减精度可达 0 1dB。
A electro magnetically driven micro electro mechanical systems (MEMS) variable optical attenuator is fabricated by microfabrication technology. The attenuator is evaluated, and the factors effecting on its optical performance are also analyzed. The results show that the MEMS attenuator has less than 3 dB fiber to fiber insertion loss at 1550 nm wavelength and 45 dB return loss,0 40dB attanuation range and 0.1dB attenuation accuracy.
出处
《微细加工技术》
2002年第1期60-65,共6页
Microfabrication Technology
