摘要
表面分析不同于传统的体相分析,简述我国表面分析发展概况,说明表面分析技术的特点和应用。并对XIS和AES进行了综述。
The Surface analysis is different from the traditional bulk analysis. A development account of national surface analysis is brief described. The features and applications of surface analytical techniques are illustrated, Finally, both XPS and AES are summarized.
出处
《现代仪器》
2002年第1期5-10,共6页
Modern Instruments
关键词
表面分析
表面分析技术
XPS
AES
表面分析仪器
Surface analysis Surface analytical technique X-ray Photoelectron Spectroscopy-XPS Auger Electron Spectroscopy-AES
