摘要
采用X切LiNbO3 基片 ,设计并研制了脊形结构集成电光Mach Zehnder(M Z)波导调制器 ,实验研制过程包含关键的LiNbO3 基片湿腐蚀刻槽技术和大厚度电极制作技术。研究结果表明 ,脊形结构调制器与传统的平面结构调制器相比 ,在大幅度提高调制带宽方面 。
An integrated electrooptic Mach-Zehnder modulator with ridge structure has been designed and fabricated by using X-cut LiNbO3 substrate. The key techniques of LiNbO3 wet etching and large thick electrode fabricating are contributed to form the ridge structure for the modulator. Experimental results show that the ridge-type optical modulator has much more obvious advantages in increasing the modulation bandwidth compared with a conventional modulator with planar structure.
出处
《中国激光》
EI
CAS
CSCD
北大核心
2002年第3期209-212,共4页
Chinese Journal of Lasers
关键词
脊形结构
电光调制器
X切LiNbO3
M-Z型干涉仪
Bandwidth
Electrooptical devices
Interferometers
Light modulation
Lithium compounds
Niobium compounds
Substrates