摘要
首先采用水热法制备了四种不同Sn掺杂量的一维Zn1-xSnxO纳米结构材料,然后通过介电泳纳米操控技术将制备的四种纳米结构排布到预先设计的Ti/Au电极之间,进而构建四种湿度传感器,并进行传感特性测试。通过对四种传感结构的测试结果分析发现,采用原子数分数为3%的Sn掺杂ZnO纳米材料构建的传感器具有较好的传感特性,相对湿度在11.3%-97.3%内其最大灵敏度为7 397%,响应与恢复时间均为2 s。结合湿度多层吸附理论深入研究掺杂对湿度传感特性的影响。结果表明,通过Sn掺杂对纳米结构中载流子浓度以及晶格应变的调控,可以有效改善材料的电导与表面特性,提升Zn1-xSnxO纳米湿度传感器的灵敏度、响应与恢复时间和迟滞等传感特性。
Four kinds of one-dimensional Zn1-xSnxO nano-structure materials doped with different amounts of Sn were firstly prepared with the hydrothermal method.Then four nano-structures were arranged between the previously designed Ti/Au electrodes by using dielectrophoresis nanomanipulation technology.Subsequently,four kinds of humidity sensors were constructed,and the sensing characteristics were tested.By analyzing the test results of the four kinds of sensing structures,it is found that the sensor constructed with the ZnO nano-material doped with Sn atom fraction of 3% has excellent sensing properties,such as the maximum sensitivity of 7 397%and response/recovery time of 2 s/2 s for the relative humidity range of 11.3%-97.3%.Based on the humidity multi-layer adsorption mechanism,the influence of the doping on the humidity sensing properties was studied in depth.The results show that the conductivity and surface properties of the materials can be effectively improved by the regulation of the doping amount of Sn to the carrier concentration and lattice strain of the nano-structure.Therefore,the sensitivity,response time,recovery time,hysteresis and other sensing properties of the Zn1-xSnxO nano humidity sensors were improved.
作者
匡旭良
叶子
孙宁
宋小军
刘伟景
Kuang Xuliang;Ye Zi;Sun Ning;Song Xiaojun;Liu Weijing(College of Electronical and Information Engineering,Shanghai University of Electric Power, Shanghai 200090,China)
出处
《微纳电子技术》
北大核心
2019年第2期111-118,共8页
Micronanoelectronic Technology
基金
国家自然科学基金资助项目(11404207,61604002,11647023)
上海自然科学基金资助项目(17ZR1411500)
关键词
湿度传感器
ZNO纳米结构
水热法
载流子浓度
传感特性
humidity sensor
ZnO nanostructure
hydrothermal method
carrier concentration
sensing property
