摘要
扫描探针显微镜(SPM)是微纳尺度形貌表征、物性测量及微纳操作的重要工具之一.传统的SPM只有单一探针,功能单一,多探针扫描探针显微镜(MP-SPM)的出现拓展了SPM的应用.MP-SPM的多个探针可充当精确定位的测量电极,从而提供了一种无损探测样品微纳尺度电学输运性质的方法;也可相当于多只独立活动的"手",相互配合实现复杂的纳米操作;还可以探针成像,成像信息作为其他探针操作的先验/反馈信息,从而提高操作的效率及准确性.本文首先介绍了MP-SPM的基本仪器结构,多探针距离缩小及位置标定方法,以及使用多探针技术测量材料电阻率的原理,接着总结了近年来MP-SPM在样品微纳尺度电学输运性质测量、微纳操作、并行成像与操作以及新型力学性质测量等方面的应用,最后探讨了该技术的前沿发展以及面临的机遇与挑战.
Scanning probe microscopes (SPM)is one of the important tools for micro/nano-scale morphological characterization, physical property measurement and micro/nano operation.However,the traditional SPM has only a single probe and its function is limited.The emergence of multiple-probe scanning probe microscopes (MP-SPM)greatly expands the application of SPM. Characterizing the electrical transport properties of materials is very important for materials and microelectronics,because it can effectively guide synthetization of high-quality materials and fabrication of high-performance devices.Traditionally,directly measuring the conductivity of nanomaterials is performed using the nanofabricated electrodes connected to the nanomaterial of interest and the monolithic micro-four-point probes.However,photoresist and organic solvents may be left on the surface of the nanomaterial during nanofabrication,which will affect the intrinsic measurement of electrical transport properties.As for the monolithic micro-four-point probes,probe spacing is quite large due to the limitation of the manufacturing process and it will not change any more once they have been manufactured,which limits its flexibility.MP-SPM's multiple probes can act as measuring electrodes with precise localization,and the probe-sample distance can be controlled precisely,providing a means of flexible and non-destructive detection of micro/nanoscale electrical transport properties of samples. Micro/nano-manipulation systems help to manufacture microelectronic and photonic devices,renewable energy apparatus and biomedical diagnosis chip,etc.Typical micro/nano-manipulation systems are established based on optical tweezer,magnetic tweezer,scanning electron microscopy (SEM)and SPM.However,they all have limitations.Optical tweezer may damage the sample due to the continuously irradiated lasers.Magnetic tweezer has a poor ability to control the object quantificationally,and low resolution.The system based on SEM is restricted to a vacuum working environment.On the surf
作者
许可
邵永健
李鹏
裘晓辉
Ke Xu;Yongjian Shao;Peng Lie;Xiaohui Qiu(School oflnformation &Control Engineering,Shenyang Jianzhu University,Shenyang 110168,China;Chinese Academy of Sciences (CAS)Key Laboratory of Standardization and Measurement for Nanotechnology,CAS Center for Excellence in Nanoscience,National Center for Nanoscience and Technology,Beijing 100190,China)
出处
《科学通报》
EI
CAS
CSCD
北大核心
2018年第35期3713-3726,共14页
Chinese Science Bulletin
基金
国家自然科学基金(61604048,61327813)
辽宁省自然科学基金重点项目(20170540748)资助.
关键词
多探针
扫描探针显微镜
电学输运性质测量
微纳操作
并行成像与操作
multiple-probe
scanning probe microscopy
electrical transport properties characterization
micro/nano manipulation
parallel imaging/manipulation
