摘要
采用共溅射法在 ITo/玻璃基片上沉积 Cd Te掺 Nd薄膜 ,并利用 XRD和阻抗测试研究薄膜的结构和电导性能 .结果表明 ,适当 Nd掺入可以改善 Cd
Nd doped CdTe thin films have been fabricated on ITO/glass substrate by using Co sputtering deposition. The structural and conductive properties of films have been investigated by X ray diffraction (XRD) and impedance measurements. The results show that proper doping of Nd can improve crystallinity and conductivity of CdTe films.
基金
国家自然科学基金资助项目 (5 9862 0 0 2 )
