摘要
采用正交试验方法 ,结合扫描电镜 (SEM)研究了在硫酸溶液中进行阳极氧化时电压、温度、浓度对氧化铝膜的膜厚、表面孔径和孔排布规律的影响。结果表明 ,影响氧化铝膜的膜厚、表面孔径的主次因素顺序为电压、温度、浓度 ,此外由于电压、温度、浓度三者共同影响着阳极氧化的速率和反应过程的稳定性 。
Effect of anodizing voltage, electrolyte temperature and concentration on anodicAl2O3 film thickness, surface pore diameter and the regularity of the nanohole array during Al anodic oxidation in sulphunc acid had been studied by orthogonal experiment and SEM. The result indicated that more important factors were anodizing voltage, electrolyte temperature and concentration in affecting anodic film thickness and surface pore diameter in sequence. Moreover, anodizing voltage in cooperation with electrolyte temperature and concentration decided the final orderly degree of the nanohole array as a result of their influence on anodic oxidation velocity and stability.
出处
《材料保护》
CAS
CSCD
北大核心
2001年第12期28-29,共2页
Materials Protection
