摘要
对薄膜力学性能的测试方法。
The present work summarizes the novel experimental methods recently developed to characterize the mechanical properties of thin films. These methods include the nanoindentation test, the indentation fracture technique, the micro rotating structure indicator, the bending test of microcantilever beams, the microbridge test, and the bulge test. The features and merits of these experimental methods are described in detail. The mechanical properties of thin films, such as residual stresses, Young's modulus, fracture strength, hardness, and etc, characterized by these methods are also briefly introduced.
出处
《机械强度》
CAS
CSCD
北大核心
2001年第4期413-429,共17页
Journal of Mechanical Strength
基金
香港特别行政区基金资助项目
关键词
薄膜
力学性能
残余应力
弹性模量
强度
硬度
纳米压痕
压痕断裂法
微悬臂梁
鼓膜试验
MEMS
Thin film
Mechanical characterization
Residual stresses
Young's modulus
Strength
Hardness
Nanoindentation
Indentation fracture technique
Micro rotating structure
Microcantilever beam
Microbridge test
Bulge test
