摘要
就如何利用MEMS技术 ,实现压力微传感器的设计进行详细论述。该传感器利用特殊的机械结构 ,大大改善了传统接触式压力传感器 ,工作区域狭小 ,线性度较差等问题 ,使压力传感器在高载荷条件下 ,由小扰度向大扰度过渡时 ,不产生非线性跳变 ,从而大大提高了器件的稳定性与动态特性。
Focuses on how to produce a new type of pressure micro sensor,using the MEMS technology.The sensor is provided with a special mechanical structure.By this way,it comes over many shortcomings of the traditional pressure micro sensor,whose work range is narrow.Furthermore,it avoids the discontinuity of the traditional pressure micro sensor,when the distortion increases,under the great pressure.The dynamic characters are improved,markedly.
出处
《仪表技术与传感器》
CSCD
北大核心
2001年第12期4-6,共3页
Instrument Technique and Sensor
关键词
压力微传感器
MEMS
扰度
硅梁
设计
Untouched-Mode Pressure Micro Sensor
MEMS
Silicic Girder
Distortion
