摘要
基于标量衍射理论设计了 8位相菲涅尔衍射微透镜阵列 .利用多次曝光和离子束刻蚀技术在大规模面阵( 2 5 6× 2 5 6) Pt Si红外焦平面阵列的背面制作了单片集成微透镜阵列样品 (单元面积为 3 0μm× 4 0μm ) .测试结果表明 ,单片集成微透镜的红外焦平面阵列样品的信噪比提高了 2 .0倍 .
8-phase-level 256×256 element diffractive microlens arrays with element dimension of 30 μm×40 μm were fabricated on the backside of the PtSi infrared focal plane arrays (IRFPA) based on the scalar diffraction theory and computer aided design. The measurement results indicate that the ratio of the signal-to-noise of the PtSi IRFPA sample with microlenses is increased by a factor of 2.0.
出处
《红外与毫米波学报》
SCIE
EI
CAS
CSCD
北大核心
2001年第5期340-342,共3页
Journal of Infrared and Millimeter Waves
基金
国家自然科学基金 (编号 60 0 860 0 3)~~
