摘要
设计了一种半导体激光干涉测量仪 ,可以实时测量物体的微小振动。通过信号处理电路对干涉信号进行分析 ,得到实际振动的振幅和频率。给出了具体的理论分析。实验结果验证了该干涉仪的实用性。
A new laser diode interferometer for micro-vibration measurement is proposed. The interferometer can measure micro-vibrations of an object in real-time. A reflector adhered to a piezoelectric crystal was used as the measured vibrating object in experiment. The interference signal is analyzed with signal processing circuits and the amplitude and frequency of vibrations are obtained. The theory analysis is described. The experimental results verify the usefulness of the interferometer.
出处
《光学学报》
EI
CAS
CSCD
北大核心
2001年第5期578-580,共3页
Acta Optica Sinica
基金
国家自然科学基金! (6 99780 2 4)
上海市应用材料研究与发展基金!资助课题
