摘要
采用蒙特卡罗模拟对氮辉光放电等离子体中轰击阴极的重粒子 (N+ 2 ,N+ ,Nf 及N2f)能量分布随放电参数的变化规律进行了研究。结果表明 :阴极壁前诸粒子的能量分布取决于粒子被加速的能量和碰撞频率 ,能量较低的快原子Nf 的密度比高能粒子N+ 的密度高近两个量级。在活性氮粒子 (N+ ,Nf)产率最高的放电条件下 ,适当降低放电气压 ,提高阴极位降和气体温度 ,有利于两种活性氮粒子 (N+ ,Nf)达到阴极。
Using Monte Carlo simulation,the energy distribution of heavy particles bombarding negative wall under different discharges is studied.It is shown that various particle energy distributions in front of the cathode wall depend on the electric field and the collision frequency.The density of low energy fast atoms (N f) is nearly two magnitudes higher than that of high energy particles (N +) in front of the cathode.Under the condition corresponding to the highest creation rate of active species (N +,N f),Suitable decrease in gas pressure,and increase in discharge voltage and gas temperature will be beneficial to the active particles reaching a cathode.
出处
《核聚变与等离子体物理》
CAS
CSCD
北大核心
2001年第2期94-100,共7页
Nuclear Fusion and Plasma Physics
基金
河北省自然科学基金!资助项目 (5970 58)
