摘要
本文详细论述了用于复杂轮廓表面测量的光纤传感器系统 ,给出了关键技术的具体实现方法。实验结果验证了方法设计的正确和有效 :激光器光功率输出的稳定性好于 0 .0 7% ,横向分辨力为 8μm,测量范围可达 6 mm。
The fiber optic sensor system used for complex surfacecontour measurement was discussed in this paper.Some key problems appeared when using fiber optic sensor for displacement measurement were fairly settled.Experimental results approved the validity of the designed system,and the results also indicated that the stability of the light power of LD was better than 0.07 %,the lateral resolution was 8 μm and the measurement range was enlarged to 6 mm.
出处
《光电子．激光》
EI
CAS
CSCD
北大核心
2001年第5期506-509,共4页
Journal of Optoelectronics·Laser
