摘要
介绍了一种基于空间干涉原理的亚微米零差干涉位移测量方法。该方法是对笔束激光干涉仪在微位移测量领域的应用 ,干涉仪的测量精度不受光束波前畸变等光源噪声的影响。给出了干涉仪主要结构参数的选取原则 ;构建了用于微位移测量的笔束激光干涉仪实验系统。实验结果表明 ,该系统具有纳米测量分辨率。
A novel measurement method for mircrodisplacement is described, which is based on the principle of spatial interference, and derived from the pencil beam interferometer used for optical surface profile measurement Unlike other single frequency interferometer, this novel interferometer could maintain its measurement accuracy in the existence of such light source noises as the laser intensity fluctuation, wavefront distortion and so on The structural parameters of the interferometer are discussed An experimental system is constructed, and the result shows that the interferometer could be used for microdisplacement measurement
出处
《光学技术》
CAS
CSCD
2001年第3期106-108,共3页
Optical Technique
