摘要
60年代以来,人们逐步应用石英晶体作为补偿元件进行微量运动控制,尤其是近些年发展起来的预测补偿控制技术多用此元件.为了得到所需的补偿量,必须精确地控制加在石英元件上的电压,并准确地描述其动态特性.众所周知,当施于石英晶体一定的电压时,晶体本身的尺寸会发生微量变化.工程中常把这种位移与电压的关系视作线性的,而忽略了交变电压作用时的迟滞现象的影响.这虽给问题的处理带来了方便,但降低了补偿元件的精度.本文试图从工程实用的观点,应用非线性时序模型描述石英补偿元件P-172的动态特性,从而达到提高补偿精度的目的.
It is well known that hysteresis nonlinearity exists in a piezoelectric actuator and affects the control accuracy when the actuator is used for fine movement control. In order to model the nonlinearity, a nonlinear bivariate time series model has been developed and used to describe the dynamics of the piezoelectric actuator. The selection of the nonlinear terms as well as their physical meanings are discussed. Experiment and simulation show the feasibility of this modelling approach.
出处
《华中理工大学学报》
CSCD
北大核心
1991年第2期129-132,共4页
Journal of Huazhong University of Science and Technology
关键词
石英元件
动态特性
时序模型
Piezoelectric actuator
Accuracy control
Hysteresis
Nonlinear- ity
Time series
Modelling
