摘要
我们使用薄膜沉积法制作 1 6阶菲涅耳透镜 ,其衍射效率接近 87% .用它代替常规的光学透镜可实现系统的轻量化、小型化、增加系统设计的自由度 .在标量衍射理论的基础上 ,应用菲涅耳公式和傅里叶变换分析 Si O2 薄膜和基底的表面反射、对准误差以及入射角对 1 6阶菲涅耳透镜衍射效率的影响 .
The thin film deposition has been used to fabricate 16 step Fresnel lens.Its diffractiveefficiency is approximately 87%.Instead of conventional optical elements,it can perform system′s lightweight,miniaturization and increase degree of freedom in the design.Based on the scalar theory,Fresnel formula and Fourier transform are used to analyze the effects of the surface reflection of SiO 2 thin film and substrate,the alignment errors and the angle of incidence of light beam on the diffractive efficiency of 16 step Fresnel lens.
出处
《光子学报》
EI
CAS
CSCD
北大核心
2001年第3期325-330,共6页
Acta Photonica Sinica
关键词
薄膜沉积
菲涅耳透镜
表面反射
对准误差
入射角
衍射效率
Thin film deposition
Fresnel lens
Surface reflection
Alignment errors
Angle of incidence
Diffractive efficiency
