摘要
本文对A1N/128°Y-X LiNbO_3层结构的声表面波特性进行了研究。得到此层结构在较小的A1N膜厚时,不但具有延时温度系数(TCD)为零的特性;而且,在零TCD时,有高的机电耦合系数(k)及良好的频响特性。
This paper gives the study of properties for surface acoustic waves(SAW's)of the layered structure consisting of a AlN film on 128° rotated Y-cut Xpropagating LiNbO_3 strueture.It is discovered that the layered structure not onlyhas a zero TCD but also has a high value of K at smaller AlN film thickness,also,has a good frequency response.
出处
《湖南师范大学自然科学学报》
CAS
1991年第3期227-231,共5页
Journal of Natural Science of Hunan Normal University
关键词
层结构
声表面波
延时温度系数
surface acoustic wave(SAW)
layered structure
temperature coefficient of delay(TCD)
electromechanical coupling coefficient(K)
frequency response
inter digital transducers
stiffen
