摘要
对非晶态Fe-Cr-Al/Si薄膜研究了方块电阻与灵敏度、电阻温度系数、电阻率以及薄膜厚度等的关系;根据升温时薄膜电阻开始剧变推算了薄膜的晶化温度,并评估了Fe-Cr-Al/Si薄膜作为力传感器敏感材料的品质。
Displaying a good linearity between the resistance and the stress, the amorphous Fe-Cr-Al/Si thin film is promising to be used as a transducer. Here the dependence of gauge factor, the temperature coefficient of resistance, the resistivity on sheet resistance and the thickness of the films are reported. Heat treatments of the samples are investigated. The crystalization temperature of the films is estimated by the drastic change in resistance during heating. Based on thess experimental results, an evaluation about the usefulness of the films for force transducer is made.
出处
《航空学报》
EI
CAS
CSCD
北大核心
1991年第8期B411-B416,共6页
Acta Aeronautica et Astronautica Sinica
基金
航空航天工业部科学研究基金
关键词
薄膜
电阻
应力
温度系数
非晶态
thin film, resistivity-strain characteristics, temperature coefficient of resistivity.
