摘要
为实现用电场强度、电子能量控制臭氧产生浓度和臭氧分解 ,采用α型Al2 O3 制成电介质薄层 ( 2 30 μm)以及窄放电间隙 ( 1 1 0 μm )的新工艺 ,取得折合电场强度E大于 4 0 0Td的强电离放电 ,电子取得平均能量大于1 0eV ,臭氧浓度达到 2 0 0 g/m3,臭氧产生效率达到 1 0 0 g/ (kW·h) .进而实现臭氧产生装置生产组合模块化、小型化 .
This paper presents the formed methods of strong ionization discharge of dielectric barrier and plasma chemical reaction process of ozone generation. Ozone combination and decomposition are controlled by electric field intensity and electron energy. Therefore, new technologies with thinner dielectric layers (230μm) of model αAl 2O 3 and narrow discharge gap (110μm) are introduced, and strong ionization discharge is gained which reduced field ( E ) and electron average energy are more than 400Td and 10 eV respectively. Ozone concentration reaches to 200g/m 3 and ozone producing efficiency is 100g/(kW·h). Ozone generator of big yield and miniaturization with module assembled method is realized.
出处
《环境科学》
EI
CAS
CSCD
北大核心
2001年第2期126-128,共3页
Environmental Science
基金
国家自然科学基金!资助项目 (6 98710 0 2 )
国家自然科学基金!重点资助项目 (6 0 0 310 0 1)
辽宁省科学技术基金!资助项目 (972
