摘要
涡轮分子泵轴系临界转速是泵设计过程中的重要参数,当轴系在其临界转速或附近运转时,产生的剧烈振动会严重影响轴系的稳定性。为了探究动叶片对临界转速的影响,在对泵的转子系统进行简化的前提下,利用传递矩阵法计算了轴系临界转速并在此基础上借助有限元软件Solidworks Simulation对动叶片的共振频率进行了研究,有限元分析结果说明单个动叶片的共振频率远高于轴系临界转速;动叶片组在分析中可以简化为远程质量且将大幅度降低轴系临界转速,因此计算时必须将动叶片组包含在内。
The critical speed of shafting of a turbo molecular pump is an important parameter during the design process, when the shaft works near that speed, vibration will do harm to the stabilization of the shaft. In order to search the effect of the rotor blade on the critical speed, on the basis of the simplified pump, it calculates the critical speed with transfer matrix method and does research on a single rotor blade with the finite element software Solidworks Simulation, and the results show that the resonance frequency of the rotor blade is much higher than the critical speed, the rotor blade in the analysis can be simplified to a remote quality, and it will greatly reduce the critical speed of the shafting, so the rotor blade group must be included in the calculation.
出处
《机械设计与制造》
北大核心
2014年第7期109-111,115,共4页
Machinery Design & Manufacture
关键词
涡轮分子泵
临界转速
传递矩阵法
有限元分析
远程质量
Turbo Molecular Pump
Critical Speed
Transfer Matrix Method
Finite Element Analysis
Remote Quality
