摘要
扫描电子显微镜要得到层次清晰、立体感强且分辨率高的高质量图像,荷电效应是一个重要的影响因素。对在扫描电子显微镜成像中荷电效应的成因及其解决办法进行了系统的分析。提出采用镀膜、降低加速电压及低真空的方法,可降低荷电效应的影响。
Charged effect is an important influencing factor to get a clear,stereo,high resolution and high quality image by scanning electron microscopy (SEM).The causes and solutions for charged effect on imaging by SEM were analyzed.The methods including coating,acceleration voltage reducing,low vacuum were presented to reduce the charged effect.
出处
《理化检验（物理分册）》
CAS
2014年第1期46-48,共3页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
关键词
扫描电子显微镜
荷电效应
二次电子
scanning electron microscopy
charged effect
secondary electron
