3TO S, KWOK T C, CHEUNG C F, et al. Study of ultra-precision diamond turning of a microlens array with a fast tool servo system[J]. Proc. of SPIE, 2006(6149): 61490S 1-61490S6. 被引量：1
4MONTESANTI R C. A high bandwidth rotary fast tool servo[D]. Cambridge : Massachusetts Institute of Technology, 2004. 被引量：1
5GAO W, AAOKI J, JU B F, et al. Surface profile measurement of a sinusoidal grid using an atomic force microscope on a diamond turning machine[J]. Precision Engineering, 2007(31): 304-309. 被引量：1
6JIANG Wenda, BILL T. Diamond turning freeform optics[J]. Key Engineering Material, 2008(364-366). 1-6. 被引量：1
7KIM H S, LEE K I, LEE K M, et al. Fabrication of free-form surfaces using a long-stroke fast tool servo and corrective figuring with on-machine measurement[J]. International Journal of Machine Tools & Manufacture, 2009(49): 991-997. 被引量：1
8ZHANG H J, CHEN S J, ZHOU M, et al. Fast tool servo control for diamond-cutting microstructurcd optical components[J]. Journal of Vacuum Science & Technology B: Microelectronics and Nanomcter Structures, 2009, 27(3): 1226-1229. 被引量：1
9CUTTINO J F, MILLER A C, SCHINSTOCK D E. Performance optimization of a fast tool servo for single-point diamond turning machines[J]. IEEE/ASME Transactions on Mechatronics, 1999, 4(2): 169-179. 被引量：1
10ZHU W H, JUN M B, ALTINTAS Y. A fast tool servo design for precision turning of shafts on conventional CNC lathes[J]. International Journal of Machine Tools & Manufacture, 2001(41): 953-965. 被引量：1
