摘要
用直流反应磁控溅射法在普通玻璃上制备了 Alx Ti1 - x N(x<0 .42 )薄膜 ,用 X射线光电子能谱 (XPS)、紫外可见光谱和椭圆偏振仪研究了铝离子含量对 Ti N薄膜光学性能的影响。结果表明 ,铝离子含量主要影响 Ti
The Al xTi 1-x (x<0.42) films were formed on transparent glass substrate by reactive dcmagnetron sputtering.The effect of aluminium composition on the optical properties of the films were studied by X-ray photoelectron spectroscopy, UV/vis spectrophotometer and ellipsometry.The results show that the aluminium composition mainly effects the extinction coefficient of the films.
基金
教育部骨干教师资助项目 (生态建筑材料 )
教育部科学技术重点项目 !(990 87)
