摘要
A novel technique to generate high-density plasma-called inductively coupled plasma （ICP）, enhanced capacitively coupled plasma （CCP）- is successfully developed. The plasma can be generated using different frequency configurations, such as ICP-enhanced single-frequency ca- pacitively coupled plasma （SFCCP） and dual-frequency capacitively coupled plasma （DFCCP）. The characteristics of the plasma in the following frequency combinations are mainly investigated using a Langmuir probe, SFCCP （60 MHz）, DFCCP （60 MHz, 13.56 MHz）, SFCCP （60 MHz） and inductively coupled plasma （13.56 MHz）, DFCCP （60 MHz, 13.56 MHz） and inductively coupled plasma （13.56 MHz）. In this letter, the nitrogen and hydrogen mixture gas discharge charac- teristics of different configurations are studied. After the analysis, we can acquire the electron temperature and ion density. Then, the effect of inductively coupled discharge on SFCCP and DFCCP can be summarized. In our preliminary investigations, the main results can be given as follows. ICP can make the density of SFCCP increase and the distribution of the electron temper- ature in a radial direction more uniform. In addition, ICP not only can make the ion density of DFCCP increase, but also can improve the radial uniformity. F^rther experiments may be needed to clarify the mechanism.
A novel technique to generate high-density plasma-called inductively coupled plasma （ICP）, enhanced capacitively coupled plasma （CCP）- is successfully developed. The plasma can be generated using different frequency configurations, such as ICP-enhanced single-frequency ca- pacitively coupled plasma （SFCCP） and dual-frequency capacitively coupled plasma （DFCCP）. The characteristics of the plasma in the following frequency combinations are mainly investigated using a Langmuir probe, SFCCP （60 MHz）, DFCCP （60 MHz, 13.56 MHz）, SFCCP （60 MHz） and inductively coupled plasma （13.56 MHz）, DFCCP （60 MHz, 13.56 MHz） and inductively coupled plasma （13.56 MHz）. In this letter, the nitrogen and hydrogen mixture gas discharge charac- teristics of different configurations are studied. After the analysis, we can acquire the electron temperature and ion density. Then, the effect of inductively coupled discharge on SFCCP and DFCCP can be summarized. In our preliminary investigations, the main results can be given as follows. ICP can make the density of SFCCP increase and the distribution of the electron temper- ature in a radial direction more uniform. In addition, ICP not only can make the ion density of DFCCP increase, but also can improve the radial uniformity. F^rther experiments may be needed to clarify the mechanism.
基金
supported by National Natural Science Foundation of China(Nos.11075114,10975106)
the Priority Academic Program Development of Jiangsu Higher Education Institutions of China
