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溶胶–凝胶法在聚酰亚胺表面沉积氧化铝薄膜及性能 被引量:8

Fabrication and Properties of Polyimide Film with Aluminum Oxide Thin Films via Sol-Gel Method
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摘要 采用溶胶凝胶法利用表面处理和离子交换技术,在纯聚酰亚胺(polyimide,PI)薄膜表面提拉制备了氧化铝(Al2O3)薄膜。利用扫描电子显微镜(scanning electron microscopy,SEM),原子力显微镜(atomic force microscopy,AFM),X射线衍射仪(X-ray diffractions,XRD)对薄膜进行了表征,并对表面覆盖Al2O3薄膜的PI薄膜(复合膜)的热稳定性(thermogravimentric analyses,TGA)、击穿和耐电晕性能进行分析。结果显示Al2O3薄膜在PI基体表面呈连续分布、表观平整且致密。断面显示Al2O3薄膜和PI基体有非常清晰、明显的三层结构,Al2O3薄膜的厚度约为1?m;Al2O3薄膜主要由?-AlOOH,??-AlOOH和?-AlOOH三种一水合氧化铝构成;热稳定性显示在初始升温阶段复合膜的热失重比纯膜快,后期趋向于持平;击穿测试结果表明由于复合膜中含有极性基团而比纯膜的击穿场强有所下降;耐电晕测试结果表明,复合膜的耐电晕时间由纯膜的4.4 min提高到了104.6 min,耐电晕寿命获得了极大的提升,比纯膜提高了23.8倍。 Aluminum oxide(Al203) thin films on polyimide (PI) substrate were prepared via sol-gel method based on surface modification and ion exchange technique. The composite films with Al2O3 layers were characterized by scanning electron microscopy (SEM), atomic force microscopy (AFM), X-ray diffractions (XRD) and Thermogravimentric analyses (TGA), respectively. The breakdown field strength and corona-resistant time of composite films were tested and compared with original PI film. Results from SEM, AFM and XRD measuring reveal that the Al2O3 thin films are compact and smooth layers which consists of α-AlOOH, α'-AlOOH and β-AlOOH with invisible particle. SEM on fracture surface of composite films shows that inorganic-organic interface is very clear and the thicknesses of the Al2O3 thin films are about llxm. Results of TGA and breakdown field strength show that the thermal property and breakdown field strength of composite film decreases slightly. Corona-resistant test results show that the corona-resistant time of composite film is greatly improved compared with original PI film from 4.4min up to 104.6min, increasing by 23.8 times, which means that the corona-resistant life has a significant improvement.
出处 《中国电机工程学报》 EI CSCD 北大核心 2014年第12期1965-1971,共7页 Proceedings of the CSEE
基金 国家自然科学基金项目(51177030) 黑龙江省自然科学重点基金项目(ZD201004)~~
关键词 聚酰亚胺 溶胶凝胶法 表面处理 氧化铝薄膜 耐电晕性能 polyimide sol-gel method aluminum oxidethin films surface modification corona-resistant property
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