摘要
薄膜体声波谐振器(FBAR)的谐振频率会受外界环境温度的影响而产生漂移,对于FBAR滤波器而言,这种温度-频率漂移特性会导致其中心频率、插入损耗、带内纹波等性能发生变化,降低其在电学应用中的可靠性。应用ANSYS有限元分析软件,对一个典型Mo-AlN-Mo结构的FBAR进行温度-频率漂移特性的仿真,在-50^+150℃温度范围内得到其温度频率系数为-33.6×10-6/℃。通过在FBAR结构中添加一层正温度系数的补偿层,分析了补偿层厚度对FBAR温度-频率漂移特性、谐振频率和机电耦合特性的影响。设计的温度补偿FBAR其温度频率系数为0.872×10-6/℃,比未添加补偿层时有很大改善。
The resonant frequency of film bulk acoustic resonators （FBAR） drifts when the environmental tem- perature changes. This property of temperature-frequency drift will influence the center frequency, insertion loss and passband ripples of FBAR filters, reducing the reliability of its electrical application. A temperature-frequency drift simulation of a typical Mo-A1N-Mo FBAR is achieved by means of finite element analysis software ANSYS, the simulated temperature coefficient of frequency is - 33. 6 × 10-6/℃ within the temperature range of - 50 ＋ 150 ℃. By adding a compensated layer with positive temperature coefficient in the FBAR structure, the effects of the compensated layer thickness on temperature-frequency drift, resonant frequency and electromechanical coupling are analyzed. The simulated temperature coefficient of frequency of a designed temperature compensation FBAR is 0. 872 × 10-6/℃, the property of temperature-frequency drift is effectively improved.
出处
《压电与声光》
CSCD
北大核心
2014年第2期171-175,共5页
Piezoelectrics & Acoustooptics
基金
中国工程物理研究院超精密加工技术重点实验室基金资助项目(2012CJMZZ00009)
西南科技大学制造过程测试技术省部共建教育部重点实验室开放课题基金资助项目(11ZXZK03)
西南科技大学研究生创新基金资助项目(13ycjj31
13ycjj36)
重庆大学光电技术及系统教育部重点实验室访问学者基金资助项目(2013MS04)
关键词
薄膜体声波谐振器
温度-频率漂移
温度频率系数
谐振频率
机电耦合
有限元分析
film bulk acoustic resonator （FBAR）
temperature-frequency drift
temperature coefficient of fre-quency （TCF）
resonant frequency
electromechanical coupling
finite element analysis （FEA）
