摘要
应用双幂指数散射截面求解输运方程 ,推导出离子射程分布函数矩的递推公式 ,表明双幂指数截面与传统的单幂截面一样 ,可以用来求解输运方程 .此外 ,采用 Padé逼近 ,由分布函数的矩成功地组合了分布函数 ,计算精度都达到 1 0 -8以上 ,这说明 ,在由矩组合分布函数的计算方面 ,Padé逼近可能是最佳的运算工具 .通过大量的计算发现 ,当入射离子能量比较低时 (几百电子伏特 ) ,离子注入深度要比用传统单幂截面所计算的值浅一些 ,分布范围也窄一些 ,这与作者对溅射原子出射深度以及 Frenkel-对产生计算所得的结论相符 .但当选择特征长度为深度单位时 ,用单、双截面计算的无量纲归一化离子射程分布函数相当符合 。
The author has solved the transport equation by using the double power scattering cross section proposed recently, and derived the recursion formula for moments of the ion range distribution. The calculation has demonstrated that the double power scattering cross section is similar to the traditional single power cross section, and it can be used to solve the transport equation . In addition, by using the Pad approximation, the author has reconstructed the ion range distribution successfully based on the moments with an accuracy of 10 -8 . The result has shown that the Pad approximation may be the best method to reconstruct the distribution function. The author has also found that for the low energy ion (few hundreds eV) incidence, the depth of ion implantation must be smaller, the ion range distribution must be narrower than the results predicted theoretically by using the single power cross section. This conclusion agrees with the author's work on the depth of sputtered atom and Frenkel Pair production. Nevertheless, as long as the characteristic length is used as the depth unit, the unified ion range calculated by using both double and single cross section are about the same. This conclusion is incorrect in the radiation damage distribution calculation.
出处
《中国矿业大学学报》
EI
CAS
CSCD
北大核心
2000年第6期650-653,共4页
Journal of China University of Mining & Technology
基金
安徽省教育厅自然科学基金项目资助! (2 0 0 0 j12 0 8)
