摘要
本文综述了压电材料在声表面波器件中的应用 ,分别介绍了压电单晶、压电陶瓷、压电薄膜等基片在SAW器件中的发展进程及其各自的特点 ,并对我国声表面波用基片材料的发展进行了展望。
The application of piezoelectric material used for SAW was reviewed,and the development process and properties of the piezoelectric crystal,ceramics and thin film which used in SAW devices were discussed respectively.In the end,the prospect of SAW substrate in China was forecasted.
出处
《硅酸盐通报》
CAS
CSCD
2000年第6期32-36,共5页
Bulletin of the Chinese Ceramic Society
