摘要
圆光栅均匀性误差是圆光栅质量的重要指标之一,本文详细论述了圆光栅均匀性误差,并且提出了几种减小或消除这一误差的措施。
Homogencity error of circle grating is one of the most important quality parameesr.In this paper, the homogeucity error of circle grating is discussed in detail and tome methods to eliminate or reduce the error are shown.
出处
《光学仪器》
1991年第2期25-29,共5页
Optical Instruments
