摘要
设计了一种L型的二维微力传感器,该二维微力传感器采用悬臂梁式结构。在弹性力学和材料力学基础上,利用Solidworks三维建模软件和ANSYS仿真软件对传感器分别进行模型建立和有限元应变分析。对该二维微力传感器的实体进行标定,得出了力和输出电压之间的关系。然后,在设计与分析二维微力传感器的基础上,研制了二维微力传感器阵列测试系统。最后,在测试系统实施了不同预压力下的湿吸力测试试验,验证了传感器和系统的可靠性。
A L-shaped two-dimensional（ 2D） micro-force sensor with cantilever beam structure is designed.On the basis of elastic mechanics and mechanics of materials,to build model with 3D software Solidworks and stress analysis with simulation software ANSYS.Calibrate sensor entity,to obtain relationship between force and output voltage.On the basis of design and analysis on 2D micro-force sensor,a 2D array test system of micro-force sensors is developed.Finally,wet adhesion test experiments under different preload are implemented on test system to verify reliability of sensor and system.
出处
《传感器与微系统》
CSCD
北大核心
2014年第3期79-81,共3页
Transducer and Microsystem Technologies
基金
国家自然科学基金资助项目(51105279)
中央高校基本科研业务费专项资金资助项目
关键词
仿生湿吸
微力传感器
ANSYS
标定
bionic wet adhesion
micro-force sensor
ANSYS
calibration
